In this paper, a study is presented in which piezoelectric microbenders were fabricated and tested to demonstrate energy generating performance. Trapezoidal and diagonal (with respect to the substrate crystal directions) unimorph PZT cantilever benders with interdigitated electrode patterns were utilized. The interdigitated design is beneficial for microenergy harvesting devices because it utilizes the mode, which can generate higher voltage than the mode design. It can also eliminate the bottom electrode by only using an interdigitated top electrode, which facilitates fabrication, as opposed to the mode design that requires both top and bottom electrodes. The micro-electromechanical system (MEMS) benders fabricated in this study consist of layers of and Au/Cr interdigitated electrode on the top. The experimental results indicate that the fundamental frequencies of the microbenders are about 9.1 kHz for the trapezoidal bender and 18.48 kHz for the diagonal bender. The microtrapezoidal bender can generate power of approximately into a resistive load at the resonant frequency. The diagonal bender can generate power of about into a resistive load at the resonant frequency.
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e-mail: changki.mo@tricity.wsu.edu
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February 2011
Research Papers
Fabrication and Energy Harvesting Measurements of Vibrating MEMS Piezoelectric Benders
Changki Mo,
Changki Mo
School of Mechanical and Materials Engineering,
e-mail: changki.mo@tricity.wsu.edu
Washington State University-Tri-Cities
, Richland, WA 99354
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Ryan R. Knight,
Ryan R. Knight
School of Mechanical and Materials Engineering,
Washington State University-Tri-Cities
, Richland, WA 99354
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Amanda A. Frederick,
Amanda A. Frederick
School of Mechanical and Materials Engineering,
Washington State University-Tri-Cities
, Richland, WA 99354
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William W. Clark
William W. Clark
School of Mechanical and Materials Engineering,
Washington State University-Tri-Cities
, Richland, WA 99354
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Changki Mo
School of Mechanical and Materials Engineering,
Washington State University-Tri-Cities
, Richland, WA 99354e-mail: changki.mo@tricity.wsu.edu
Ryan R. Knight
School of Mechanical and Materials Engineering,
Washington State University-Tri-Cities
, Richland, WA 99354
Amanda A. Frederick
School of Mechanical and Materials Engineering,
Washington State University-Tri-Cities
, Richland, WA 99354
William W. Clark
School of Mechanical and Materials Engineering,
Washington State University-Tri-Cities
, Richland, WA 99354J. Vib. Acoust. Feb 2011, 133(1): 011006 (7 pages)
Published Online: December 17, 2010
Article history
Received:
January 14, 2010
Revised:
August 17, 2010
Online:
December 17, 2010
Published:
December 17, 2010
Citation
Mo, C., Knight, R. R., Frederick, A. A., and Clark, W. W. (December 17, 2010). "Fabrication and Energy Harvesting Measurements of Vibrating MEMS Piezoelectric Benders." ASME. J. Vib. Acoust. February 2011; 133(1): 011006. https://doi.org/10.1115/1.4002784
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