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Keywords: TEOS
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Journal Articles
Journal:
Journal of Tribology
Publisher: ASME
Article Type: Research Papers
J. Tribol. July 2005, 127(3): 639–651.
Published Online: June 13, 2005
...Jamshid Sorooshian; Leonard Borucki; David Stein; Robert Timon; Dale Hetherington; Ara Philipossian This study seeks to explain removal rate trends and scatter in thermal silicon dioxide and PECVD tetraethoxysilane-sourced silicon dioxide (PE-TEOS) CMP using an augmented version of the Langmuir...
