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Keywords: Oxide
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Journal Articles
Journal:
Journal of Tribology
Publisher: ASME
Article Type: Research Papers
J. Tribol. July 2005, 127(3): 639–651.
Published Online: June 13, 2005
... thermal oxide (TOX) removal rates. Polishing was performed on a Speedfam-IPEC 472 polisher using Rodel IC-1400 K-groove pads and Fujimi SS-12 fumed silica slurry. It was found that the average fitting errors using the Preston, Zhang and Busnaina, Tseng and Wang, and Zhao and Shi models were approximately...
