Designing Piezoelectric Interdigitated Microactuators Using Finite Element Analysis

This paper presents a methodology toward designing, analyzing, and optimizing piezoelectric interdigitated microactuators using multiphysics finite element analysis. The models used in this paper were based on a circularly interdigitated design that takes advantage of primarily the $d33$ electromechanical piezoelectric constant coefficient. Because of the symmetric nature of the devices, a small number of 2D axisymmetric parametric models were developed to characterize the behavior of the diaphragms. The parametric models offered a large range of possible results from a very small number of models. The variations in the design parameters and their effects on deflection were captured using these models. The models also showed that several of the design parameters were naturally coupled. Discrete models were then used to capture the variations in the key design parameters during fabrication. The numerical models correlate well to the maximum deflection of the experimental devices.