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Keywords: piezoelectric actuator
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Journal Articles
Publisher: ASME
Article Type: Special Section: Micromanufacturing
J. Manuf. Sci. Eng. June 2008, 130(3): 031112.
Published Online: May 16, 2008
.... , and Lining , S. , 2005 , “ Hysteresis and Creep Compensation for Piezoelectric Actuator in Open-Loop Operation ,” Sens. Actuators, A 0924-4247 10.1016/j.sna.2005.03.056 , 122 ( 1 ), pp. 124 – 130 . Yeh , T. J. , Lu , S. W. , and Wu , T. Y. , 2006 , “ Modeling...