A piezoelectrically driven, submicron XY-positioning stage with multiprocess capability is developed and then integrated into two micro∕nanoscale manufacturing processes to improve their performance. The design is based on the HexFlex™ mechanism but is modified to improve structural robustness using a combination of factorial design, linear programming, and finite element analysis. Performance analysis reveals travel ranges of 16μm (⁠X-axis) and 8μm (⁠Y-axis), positioning accuracies of 87nm (⁠X-axis) and 92nm (⁠Y-axis), and overall stiffnesses of 32N∕μm (⁠X-axis) and 36N∕μm (⁠Y-axis). A comparison of microfluidic channels manufactured with a micromachine tool (mMT) alone and with the stage stacked on the mMT shows an improvement in feature accuracy from 870nmto170nm⁠. The stage is integrated with an electrochemical deposition setup. Nanowire structures with sharp angles are fabricated. The diameter of these nanowires shows an improvement in uniformity by decreasing the standard deviation of diameter variation from 2.088μmto0.009μm⁠.

Issue Section:
Special Section: Micromanufacturing
Keywords:
precision positioning, flexure stage, microscale machining, electrochemical deposition, piezoelectric actuator, finite element analysis, linear programming, machine tools, microfluidics, micromachining, nanotechnology, nanowires, piezoelectric actuators, precision engineering
Topics:
Actuators, Design, Finite element analysis, Machining, Manufacturing, Microfluidics, Microscale devices, Nanoscale phenomena, Nanowires, Piezoelectric actuators, Stiffness, Wire, Bending (Stress), Linear programming, Errors, Cutting, Displacement, Copper, Micromachining, Robustness
1.
Yao
,
Q.
,
Dong
,
J.
, and
Ferreira
,
P. M.
, 2007, “
Design, Analysis, Fabrication and Testing of a Parallel-Kinematic Micropositioning XY Stage
,”
Int. J. Mach. Tools Manuf.
0890-6955,
47
(
6
), pp.
946
–
961
.
Crossref
Search ADS
 
2.
Chang
,
S. H.
,
Tseng
,
C. K.
, and
Chien
,
H. C.
, 1999, “
An Ultra Precision XYθz Piezo-Micropositioner; Part I: Design and Analysis
,”
IEEE Trans. Ultrason. Ferroelectr. Freq. Control
0885-3010,
46
(
4
), pp.
897
–
905
.
Crossref
Search ADS
PubMed
 
3.
Chang
,
S. H.
,
Tseng
,
C. K.
, and
Chien
,
H. C.
, 1999, “
An Ultra Precision XYθz Piezo-Micropositioner; Part II: Experiment and Performance
,”
IEEE Trans. Ultrason. Ferroelectr. Freq. Control
0885-3010,
46
(
4
), pp.
906
–
912
.
Crossref
Search ADS
PubMed
 
4.
Culpepper
,
M. L.
, and
Anderson
,
G.
, 2004, “
Design of a Low-Cost Nano-Manipulator Which Utilizes a Monolithic, Spatial Compliant Mechanism
,”
Precis. Eng.
0141-6359,
28
(
4
), pp.
469
–
482
.
Crossref
Search ADS
 
6.
Jun
,
M. B. G.
,
DeVor
,
R. E.
, and
Kapoor
,
S. G.
, 2006, “
Investigation of the Dynamics of Microend Milling—Part II: Model Validation and Interpretation
,”
ASME J. Manuf. Sci. Eng.
1087-1357,
128
(
4
), pp.
901
–
912
.
Crossref
Search ADS
 
7.
Jun
,
M. B. G.
,
Joshi
,
S. S.
,
DeVor
,
R. E.
, and
Kapoor
,
S. G.
, 2008, “
An Experimental Evaluation of an Atomization-Based Cutting Fluid Application System for Micromachining
,”
ASME J. Manuf. Sci. Eng.
1087-1357,
130
(
3
), in press.
8.
Paros
,
J. M.
, and
Weisbord
,
L.
, 1965, “
How to Design Flexure Hinges
,”
Mach. Des.
0024-9114,
37
(
27
), pp.
151
–
156
.
9.
Hart
,
A. J.
,
Slocum
,
A.
, and
Sutin
,
J.
, 2004, “
Kinematic Coupling Interchangeability
,”
Precis. Eng.
0141-6359,
28
(
1
), pp.
1
–
15
.
Crossref
Search ADS
 
10.
Salapaka
,
S.
,
Sebastian
,
A.
,
Cleveland
,
J. P.
, and
Salapaka
,
M. V.
, 2002, “
High Bandwidth Nano-Positioner: A Robust Control Approach
,”
Rev. Sci. Instrum.
0034-6748,
73
(
9
), pp.
3232
–
3241
.
Crossref
Search ADS
 
11.
Salapaka
,
S.
, and
Sebastian
,
A.
, 2003, “
Control of the Nanopositioning Devices
,”
Proceedings of the 42nd IEEE Conference on Decision and Control
, pp.
2644
–
2649
.
12.
Changhai
,
R.
, and
Lining
,
S.
, 2005, “
Hysteresis and Creep Compensation for Piezoelectric Actuator in Open-Loop Operation
,”
Sens. Actuators, A
0924-4247,
122
(
1
), pp.
124
–
130
.
Crossref
Search ADS
 
13.
Yeh
,
T. J.
,
Lu
,
S. W.
, and
Wu
,
T. Y.
, 2006, “
Modeling and Identification of Hysteresis in Piezoelectric Actuators
,”
J. Dyn. Syst., Meas., Control
0022-0434,
128
(
2
), pp.
189
–
196
.
Crossref
Search ADS
 
14.
Honegger
,
A. E.
,
Kapoor
,
S. G.
, and
DeVor
,
R. E.
, 2006, “
A Hybrid Methodology for Kinematic Calibration of Micro∕Meso-Scale Machine Tools (mMTs)
,”
ASME J. Manuf. Sci. Eng.
1087-1357,
128
(
2
), pp.
513
–
522
.
Crossref
Search ADS
 
16.
Khapaev
,
M. M.
,
Kidiyarova-Shevchenko
,
A. Y.
,
Magnelind
,
P.
, and
Kupriyanov
,
M. Y
, 2001, “
3D-MLSI: Software Package for Inductance Calculation in Multilayer Superconducting Integrated Circuits
,”
IEEE Trans. Appl. Supercond.
1051-8223,
11
(
1
), pp.
1090
–
1093
.
Crossref
Search ADS
 
17.
Fasching
,
R. J.
,
Tao
,
Y.
,
Hammerick
,
K.
, and
Prinz
,
F. B.
, 2003, “
A Pencil Probe System for Electrochemical Analysis and Modification in Nanometer Dimensions
,”
Proc. SPIE
0277-786X,
5116
(
1
), pp.
128
–
135
.
18.
Hanein
,
Y.
,
Schabmueller
,
C. G. J.
,
Holman
,
G.
,
Lucke
,
P.
,
Denton
,
D. D.
, and
Bohringer
,
K. F.
, 2003, “
High-Aspect Ratio Submicrometer Needles for Intracellular Applications
,”
J. Micromech. Microeng.
0960-1317,
13
(
4
), pp.
S91
–
S95
.
Crossref
Search ADS
 
19.
Tao
,
Y.
,
Fasching
,
R. J.
,
Prinz
, and
F. B.
, 2004, “
Ultrasharp High-Aspect-Ratio Probe Array for SECM and AFM Analysis
,”
Proc. SPIE
0277-786X,
5389
(
1
), pp.
431
–
442
.
20.
Suryavanshi
,
A. P.
, and
Yu
,
M. F.
, 2006, “
Probe-Based Electrochemical Fabrication of Freestanding Cu Nanowire Array
,”
Appl. Phys. Lett.
0003-6951,
88
(
8
), p.
083103
.
Crossref
Search ADS
 
21.
Suryavanshi
,
A. P.
, and
Yu
,
M. F.
, 2007, “
Electrochemical Fountain Pen Nanofabrication of Vertically Grown Platinum Nanowires
,”
Nanotechnology
0957-4484,
18
(
10
), p.
105305
.
Crossref
Search ADS
 
Copyright © 2008
 by American Society of Mechanical Engineers
You do not currently have access to this content.