... layers (<50 nm thick) to explore their potential as thermal storage elements. We design and fabricate a microcalorimeter for measuring the heat capacity of thin fluorocarbons. Conventional thin film calorimetry assumes adiabatic conditions that lead to large errors as film thickness decreases. We...

...Jun Yu; Zhen’an Tang; Fengtian Zhang; Haitao Ding; Zhengxing Huang This paper presents a micropulse calorimeter for heat capacity measurement of thin films. Optimization of the structure and data processing methods of the microcalorimeter improved the thermal isolation and temperature uniformity...

...-film samples of silicon nitride and nickel titanium (NiTi), a shape memory alloy, are microfabricated and characterized. The thermal conductivity of thin-film NiTi, which increases linearly between 243 K and 313 K , is 40% lower than the bulk value at room temperature. The heat capacity of NiTi also...