... by experimental results. The pump is fabricated from silicon and glass substrates using standard MEMS fabrication techniques including deep reactive ion etching, trichlorosilane molecular vapor deposition, and metal-assisted chemical etching for porous silicon fabrication. Micromachined pressure sensors based...

... dielectrophoresis along the flow streamlines and a field-induced phase-separation, the device utilizes “dielectrophoretic gating”to separate analytes suspended in a flowing fluid based on their intrinsic polarizability properties. The gates are integrated into batch fabricated self-sealed surface-micromachined...

...Mohammad I. Kilani; Paul C. Galambos; Yousef S. Haik; Ching-Jen Chen A new viscous spiral micropump which uses the surface micromachining technology is introduced. The paper outlines the design of a spiral pump fabricated in five levels of polysilicon using Sandia’s Ultraplanar Multilevel MEMS...

... with Silicon Micromachining ,” J. Microelectromech. Syst. , 6 , pp. 48 – 54 . Yang , X. , Yang , J. M. , Tai , Y.-C. , and Ho , C.-M. , 1999 , “ Micromachined Membrane Particle Filters ,” Sens. Actuators A , 73 , pp. 184 – 191 . Chu , W.-H. , Chin , R. , Huen , T...

...Gwo-Bin Lee, Assistant Professor; Chen-I Hung, Professor; Bin-Jo Ke, Graduate Student; Guan-Ruey Huang, Graduate Student; Bao-Herng Hwei, Senior Students; Hui-Fang Lai, Senior Students This paper describes hydrodynamic focusing inside a micromachined flow cytometer. Flow cytometry is a process...