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Proc. ASME. IMECE2002, Microelectromechanical Systems, 189-194, November 17–22, 2002
Paper No: IMECE2002-39299
... 23 05 2008 Modification on surface roughness has been shown effectively to alleviate both release and in-use stiction in the previous literatures. However, the modified materials in the previously reported methods were limited to polysilicon or single crystalline silicon with special...