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Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 449-454, November 11–16, 2001
Paper No: IMECE2001/MEMS-23866
...Abstract Abstract Present study investigates the roughness effect on laminar gas flow for microchannels ranging from 40 to 600 μm with various roughness heights (40–82 nm) by systematical experiments. The micro-channels are manufactured by micro-machining technology and KOH anisotropic etching...
Proc. ASME. IMECE2020, Volume 2A: Advanced Manufacturing, V02AT02A009, November 16–19, 2020
Paper No: IMECE2020-23529
... to study the grinding force and surface integrity in creep feed grinding IC10 superalloy. In this paper, a series of orthogonal experiments have been carried out and the effects of grinding parameters on the grinding force and the surface roughness are analyzed. The topographies and defects of the machined...
Proc. ASME. IMECE2002, Microelectromechanical Systems, 189-194, November 17–22, 2002
Paper No: IMECE2002-39299
... 23 05 2008 Modification on surface roughness has been shown effectively to alleviate both release and in-use stiction in the previous literatures. However, the modified materials in the previously reported methods were limited to polysilicon or single crystalline silicon with special...