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Proceedings Papers

A Triangular Frequency-Tuning Comb Array

Ki Bang Lee, Young-Ho Cho

Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 127-131, November 16–21, 1997

Paper No: IMECE1997-0950

DOI: https://doi.org/10.1115/IMECE1997-0950

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Topics: Damping, Manufacturing, Microfabrication, Micromachining, Micromechanical resonators, Pressure, Resonance, Shapes

Proceedings Papers

Micromachined RF Signal Switching Devices on High Resistivity Silicon Substrates

Zhimin J. Yao, Chuck Goldsmith, Susan Eshelman, David Denniston

Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 69-73, November 16–21, 1997

Paper No: IMECE1997-0941

DOI: https://doi.org/10.1115/IMECE1997-0941

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Topics: Cantilevers, Design, Electrical resistivity, Manufacturing, Membranes, Metals, Micromachining, Microwaves, Signals, Silicon

Proceedings Papers

Microactuators Based on Electrothermal Expansion of Clamped-Clamped Beams

Mu Chiao, Liwei Lin

Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 75-80, November 16–21, 1997

Paper No: IMECE1997-0942

DOI: https://doi.org/10.1115/IMECE1997-0942

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Topics: Microactuators, Microbeams, Computers, Displacement, Image processing, Micromachining, Polysilicon, Thermoelasticity

Proceedings Papers

MEMS for Fluidic Controls

Chih-Ming Ho, Yu-Chong Tai

Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 27, November 16–21, 1997

Paper No: IMECE1997-0934

DOI: https://doi.org/10.1115/IMECE1997-0934

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Topics: Microelectromechanical systems, Sensors, Actuators, Circuits, Shear stress, Transducers, Computers, Integrated circuit fabrication, Micromachining, Artificial neural networks

Proceedings Papers

A Lateral Repulsive-Force Drive Using Asymmetric Electrostatic Field

Ki Bang Lee, Young-Ho Cho

Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 81-85, November 16–21, 1997

Paper No: IMECE1997-0943

DOI: https://doi.org/10.1115/IMECE1997-0943

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Topics: Atmospheric pressure, Displacement, Electric fields, Electrodes, Electromagnetic induction, Finite element analysis, Microactuators, Micromachining, Polysilicon, Resonance

Proceedings Papers

Characterization of Thin-Film Impact Microactuators

Roger L. Hipwell, Richard S. Muller, Albert P. Pisano

Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 87-91, November 16–21, 1997

Paper No: IMECE1997-0944

DOI: https://doi.org/10.1115/IMECE1997-0944

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Topics: Microactuators, Thin films, Actuators, Design, Displacement, Impulse (Physics), Micromachining, Microscale devices, Momentum

Proceedings Papers

A High-Sensitivity Micromachined Accelerometer Based on Electron Tunneling Transducers

C. H. Liu, J. K. Reynolds, A. Partridge, J. D. Grade, A. M. Barzilai, T. W. Kenny, H. K. Rockstad

Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 13-20, November 16–21, 1997

Paper No: IMECE1997-0932

DOI: https://doi.org/10.1115/IMECE1997-0932

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Topics: Accelerometers, Electrons, Micromachining, Transducers, Tunnel construction, Resonance, Silicon, Acoustics, Design, Manufacturing

Proceedings Papers

Strength and Fracture of Micromachined Silicon Structures

Wan Suwito, Martin L. Dunn, Shawn J. Cunningham

Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 99-104, November 16–21, 1997

Paper No: IMECE1997-0946

DOI: https://doi.org/10.1115/IMECE1997-0946

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Topics: Fracture (Materials), Fracture (Process), Micromachining, Silicon, Corners (Structural elements), Design, Anisotropy, Chemical etching, Crystals, Manufacturing

Proceedings Papers

Design, Fabrication and Static Test of a Resonant Microaccelerometer

Si Young Kim, Jeung Sang Go, Young-Ho Cho

Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 21-26, November 16–21, 1997

Paper No: IMECE1997-0933

DOI: https://doi.org/10.1115/IMECE1997-0933

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Topics: Design, Manufacturing, Resonance, Accelerometers, Micromachining, Polysilicon, Stress, Annealing, Deflection, Mechanical structures

Proceedings Papers

The Present and Future of Micromachining in Industrial Production of Surgical Tools

M. J. Tolkoff

Proc. ASME. IMECE97, Advances in Bioengineering, 289, November 16–21, 1997

Paper No: IMECE1997-0342

DOI: https://doi.org/10.1115/IMECE1997-0342

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Topics: Micromachining, Surgical tools, Biological tissues, Engineers, Maintenance, Valves, Biology, Blood vessels, Bridges (Structures), Carbon dioxide

Proceedings Papers

A Micromachined Device to Measure Subcellular Traction Forces

Catherine G. Galbraith, Michael P. Sheetz

Proc. ASME. IMECE97, Advances in Bioengineering, 167-168, November 16–21, 1997

Paper No: IMECE1997-0281

DOI: https://doi.org/10.1115/IMECE1997-0281

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Topics: Micromachining, Traction, Adhesion, Tissue engineering

Proceedings Papers

Contact Resistance Modeling and Measurements of an Electrostatically Actuated Micromechanical Switch

Sumit Majumder, N. E. McGruer, Paul M. Zavracky, Richard H. Morrison, George G. Adams, Jacqueline Krim

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 341-346, November 15–20, 1998

Paper No: IMECE1998-1265

DOI: https://doi.org/10.1115/IMECE1998-1265

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Topics: Contact resistance, Modeling, Switches, Gates (Closures), Cantilever beams, Coating processes, Coatings, Currents, Cycles, Electrodes

Proceedings Papers

Laser Zone Texturing of Magnetic Disk Substrates

Hee K. Park, Pieter J. M. Kerstens

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 19-25, November 15–20, 1998

Paper No: IMECE1998-1218

DOI: https://doi.org/10.1115/IMECE1998-1218

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Topics: Disks, Lasers, Manufacturing, Micromachining, Physics, Process design, Tooling

Proceedings Papers

Design, Fabrication and Uncertainty Evaluation of a Surface-Micromachined Capacitive Microaccelerometer

Ki-Ho Han, Jong-Pal Kim, Young-Ho Cho

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 347-352, November 15–20, 1998

Paper No: IMECE1998-1266

DOI: https://doi.org/10.1115/IMECE1998-1266

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Topics: Design, Manufacturing, Micromachining, Uncertainty, Accelerometers, Capacitance, Electrodes, Resonance, Circuits, Engineering prototypes

Proceedings Papers

Integrated Modeling and Testing of a Micro Hinged Structure for Sliding Friction Measurement

James M. Redmond, Maarten P. de Boer, Terry A. Michalske

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 305-311, November 15–20, 1998

Paper No: IMECE1998-1259

DOI: https://doi.org/10.1115/IMECE1998-1259

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Topics: Modeling, Sliding friction, Testing, Friction, Design, Excitation, Bending (Stress), Computer simulation, Cycles, Deflection

Proceedings Papers

Computer-Aided Micro-Mechanism Design

Elisha Sacks, James Allen

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 313-316, November 15–20, 1998

Paper No: IMECE1998-1260

DOI: https://doi.org/10.1115/IMECE1998-1260

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Topics: Computer-aided engineering, Design, Micromechanical devices, Computer software, Kinematics, Space, Computer-aided design, Gears, Geometry, Micromachining

Proceedings Papers

3-Way Microvalve for Pneumatic Applications Fabricated by Silicon Micromachining

Stephan Messner, Martin Müller, Jochen Schaible, Hermann Sandmaier, Roland Zengerle

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 159-164, November 15–20, 1998

Paper No: IMECE1998-1237

DOI: https://doi.org/10.1115/IMECE1998-1237

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Topics: Design, Dimensions, Energy consumption, Flow (Dynamics), Manufacturing, Micromachining, Silicon, Temperature, Valves

Proceedings Papers

Microfluidics of a Planar Microfabricated Fluid Filter

Yit-shun Leung Ki, Didier Maillefer, Gilles Rey-Mermet, Peter A. Monkewitz, Philippe Renaud, Harald T. G. van Lintel

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 165-170, November 15–20, 1998

Paper No: IMECE1998-1238

DOI: https://doi.org/10.1115/IMECE1998-1238

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Topics: Filters, Fluids, Microfabrication, Microfluidics, Design, Filtration, Flow (Dynamics), Micromachining, Pumps, Silicon

Proceedings Papers

An 8x8 Robust Capacitive Pressure Sensor Array

Sung-Pil Chang, Jeong-Bong Lee, Mark G. Allen

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 513-517, November 15–20, 1998

Paper No: IMECE1998-1293

DOI: https://doi.org/10.1115/IMECE1998-1293

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Topics: Pressure sensors, Micromachining, Sensors, Manufacturing, Stainless steel, Capacitance, Design, Electrodes, Flow (Dynamics), Lamination

Proceedings Papers

Fracture and Sub-Critical Crack Growth Behavior of Micromachined Single Crystal Silicon Structures

Alissa M. Fitzgerald, R. Suryanarayanan Iyer, Reinhold H. Dauskardt, Thomas W. Kenny

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 395-399, November 15–20, 1998

Paper No: IMECE1998-1275

DOI: https://doi.org/10.1115/IMECE1998-1275

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Topics: Crystals, Fracture (Materials), Micromachining, Silicon, Stress, Electrical resistance, Geometry

2 3 4 5

NARROW

A Triangular Frequency-Tuning Comb Array

Micromachined RF Signal Switching Devices on High Resistivity Silicon Substrates

Microactuators Based on Electrothermal Expansion of Clamped-Clamped Beams

MEMS for Fluidic Controls

A Lateral Repulsive-Force Drive Using Asymmetric Electrostatic Field

Characterization of Thin-Film Impact Microactuators

A High-Sensitivity Micromachined Accelerometer Based on Electron Tunneling Transducers

Strength and Fracture of Micromachined Silicon Structures

Design, Fabrication and Static Test of a Resonant Microaccelerometer

The Present and Future of Micromachining in Industrial Production of Surgical Tools

A Micromachined Device to Measure Subcellular Traction Forces

Contact Resistance Modeling and Measurements of an Electrostatically Actuated Micromechanical Switch

Laser Zone Texturing of Magnetic Disk Substrates

Design, Fabrication and Uncertainty Evaluation of a Surface-Micromachined Capacitive Microaccelerometer

Integrated Modeling and Testing of a Micro Hinged Structure for Sliding Friction Measurement

Computer-Aided Micro-Mechanism Design

3-Way Microvalve for Pneumatic Applications Fabricated by Silicon Micromachining

Microfluidics of a Planar Microfabricated Fluid Filter

An 8x8 Robust Capacitive Pressure Sensor Array

Fracture and Sub-Critical Crack Growth Behavior of Micromachined Single Crystal Silicon Structures

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